- All sections
- H - Electricity
- H01J - Electric discharge tubes or discharge lamps
- H01J 37/08 - Ion sources; Ion guns
Patent holdings for IPC class H01J 37/08
Total number of patents in this class: 1164
10-year publication summary
|
87
|
80
|
79
|
87
|
91
|
98
|
79
|
78
|
90
|
18
|
| 2015 | 2016 | 2017 | 2018 | 2019 | 2020 | 2021 | 2022 | 2023 | 2024 |
Principal owners for this class
| Owner |
All patents
|
This class
|
|---|---|---|
| Varian Semiconductor Equipment Associates, Inc. | 1282 |
138 |
| Applied Materials, Inc. | 16587 |
131 |
| Axcelis Technologies, Inc. | 429 |
98 |
| Hitachi High-Tech Corporation | 4424 |
47 |
| FEI Company | 851 |
39 |
| Hitachi High-Technologies Corporation | 2034 |
33 |
| Entegris, Inc. | 1736 |
30 |
| Hitachi High-Tech Science Corporation | 326 |
25 |
| Taiwan Semiconductor Manufacturing Company, Ltd. | 36809 |
24 |
| Sumitomo Heavy Industries ION Technology Co., Ltd. | 96 |
23 |
| Canon Anelva Corporation | 676 |
17 |
| Nissin ION Equipment Co., Ltd. | 78 |
15 |
| Praxair Technology, Inc. | 1367 |
14 |
| Carl Zeiss Microscopy, LLC | 30 |
13 |
| Massachusetts Institute of Technology | 9795 |
11 |
| ALIS Corporation | 36 |
11 |
| Tel Manufacturing and Engineering of America, Inc. | 150 |
11 |
| Advanced ION Beam Technology, Inc. | 72 |
10 |
| ULVAC, Inc. | 1448 |
10 |
| Applied Materials Israel, Ltd. | 549 |
8 |
| Other owners | 456 |